Electrochemical Etch-Stop, MEMS Potentiostats: Model SC

A dedicated potentiostat for electrochemical etch-stop proceses.

The MEMS Potentiostat Model SC has been especially designed for the use with electrochemical etch-stop techniques in silicon micromachining. The fabrication of many microelectromechanical systems (MEMS) depends on a reliable and easy to use potential controller for this processing step. The MEMS Potentiostat meets both needs. First, a high degree of integration and use of a powerful microcontroller are proof for the technical standard of this system. Very low noise op-amps, precision voltage references and high accuracy A/D- and D/A-converters guarantee excellent reproducibility of your etch-stop process. All outputs are short circuit protected and shut-down if overloaded. The unit detects common error conditions, as a broken wafer or cable, and alerts the operator providing an error description.

The MEMS Potentiostat comes with a dedicated software for Microsoft Windows XP/7/8 gives the user control over all potentiostat settings. In this case, the computer logs all data, presents them on screen and saves them to disk for later use.

Features

• Output volta ge from -10 V to 10 V
• supplementary voltage output for four electrode configuration (voltage range 0 V to 10 V)
• output current up to 750 mA
• all outputs with short-circuit protection and thermal shut-down
• auto-ranging current-to voltage converter
• alphanumeric status display (current and voltage)
• computer control via serial port (RS-232 compatible), USB 2.0 and Ethernet
• dedicated software for Microsoft Windows 7/8
• compact design
• error detection (broken wafer, broken cable, current overload)
• detection algorithm for current peak
• fully opto-isolated computer-interface allows independent parallel processing in a single etchant bath