Wet Etching

Plain Wafer holders, holders with optical inspection and etching baths

Wafer holder

single series

Wafer holders for a single wafer with backside protection

tandem series

Unique wafer holders for two wafers mounted face-to-face

single OW

Wafer holder for single sided etching with an optical backside window

single IL

Unique wafer holders with built-in backside illumination

single chip

Special custom-made holders for single chips

 

Wet Etching: HF Etch Box

Solution for medium scale HF-etching for glass wafers.

For the medium to large-scale production of glass and quartz wafers with etched features, AMMT has developed an etching system with etchant agitation. Agitation with a stirrer ensures optimal etch quality with regards to etch rate homogeneity and surface roughness.

As many as four wafers are mounted around the stirrer using AMMT's Single series of wafer holders. An HF vapor extraction is installed around the upper rim of the bath to avoid exposure to harmful vapors.

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Documentation and
Downloads

For more information, please download our product info below.

For a complete list of our product information sheets please see our Documentation Download Section.