Wet Etching: Single series

A wafer holder for a single wafer with backside protection.

The Single series wafer holders are designed for single-side etching processes that do not require electrical contacts, (e. g. time based etching, etch-stop on oxide or nitride layers, SOI wafers, glass and quarz wafers etc.)

Single series wafer holders have been used for more than 15 years in MEMS industry and research and have convinced over 100 users of their reliability and engineering quality.

The wafer is sealed by a double precision O-ring system that reduces mechanical stress on the wafer to a minimum. A cover ring on the front side holds the wafer in place.

As the customer-specific wafer thickness is machined as a recess into the cover ring, all screws can be tightened using a regular wrench without sensitivity to the applied torque. This assures a minimum of mechanical stress to the fragile wafer.

Single series wafer holders are available for 3”, 4”, 5”, 6” and 8” wafers. Please inquire for other wafer sizes or individual outline dimensions.